| dc.contributor.author | Volkert, C A | |
| dc.contributor.author | Minor, A M | |
| dc.date.accessioned | 2015-02-10T09:50:57Z | |
| dc.date.available | 2015-02-10T09:50:57Z | |
| dc.date.issued | 2007-05 | |
| dc.identifier.uri | http://hdl.handle.net/123456789/4165 | |
| dc.publisher | MRS BULLETIN | en_US |
| dc.title | Focused Ion Beam Microscopy and Micromachining | en_US |
| dc.type | Book chapter | en_US |